Etch process modules development and integration in 3D-SOC applications
authorsTutunjyan, Nina; Sardo, Stefano; De Vos, Joeri; Van Huylenbroeck, Stefaan; Jourdain, Anne; Peng, Lan; Inoue, Fumihiro; Rassoul, Nouredine; Beyer, Gerald; Beyne, Eric;
publicationMicroelectronic Engineering
volume196
pages38-48
year2018