Polymer and Bump Planarization for Fine Pitch Micro-Bump Stacking
authorsInoue, Fumihiro; Derakhshandeh, Jaber; Moeller, Berthold; Gokita, Yohei; Duval, Fabrice; Bex, Pieter; Capuz, Giovanni; Rebibis, Kenneth June; Miller, Andy; Sleeckx, Erik;
publicationECS Meeting Abstracts
number33
pages1135
year2018