Defect Identification in Bonding Surface Layers by Positron Annihilation Spectroscopy
authorsInoue, Fumihiro; Peng, Lan; Iacovo, Serena; Nagano, Fuya; Sleeckx, Erik; Beyer, Gerald; Uedono, Akira; Beyne, Eric;
publication2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
pages15-15
year2019