Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
authorsNagano, F; Iacovo, S; Phommahaxay, A; Inoue, F; Sleeckx, E; Beyer, G; Beyne, E; Gendt, S De;
publicationECS Journal of Solid State Science and Technology
volume9
number12
pages123011
year2020