Ongoing Projects
Collaborative Research
Imec (Belgium)
Overseas Device Manufacturers
Semiconductor Equipment Manufacturers
Semiconductor Materials Manufacturers
National Institute of Advanced Industrial Science and Technology (AIST)
Numerous Domestic Universities
Academic Guidance Requests
In the fiscal year 2021, we temporarily provided academic guidance (discussion/topics on advanced semiconductor development) to several companies, mainly semiconductor materials manufacturers. However, starting from the fiscal year 2022, we have not been engaged in this due to focusing on 3DHI.
Competitive Research Funding
- JST Strategic Basic Research Programs (PRESTO) 2022-2026
- JSPS Grant-in-Aid for Scientific Research (B) 2023-2026
- JSPS Excellent Young Researchers Program 2021-2025
- NEDO Post-5G Information and Communication System Development Project / Advanced Semiconductor Manufacturing Technology Development
- Private Collaborative Research Grants: Large-Scale Joint Research 2022-2025 (over 15 million yen annually, large-scale joint research with a major semiconductor equipment manufacturer)
- International (Trilateral) Joint Development Project 2022-2024
Laboratory Equipment
300mm Wafer Capability
Bonding Strength Measurement System under Inert Atmosphere
Ultrasonic Microscope (SAM)
Reflow Oven
Film Thickness Measurement Equipment
Surface Contact Angle, Surface Energy Measurement Equipment
Evaluation Equipment
Mechanical Testing Room
Nanoindenter
4-point/3-point Bending Test Equipment
UHV Direct Bonding Equipment
Chemical Testing Room
CMP Equipment
Plating Equipment
Zeta Potential Measurement Equipment
Potentiostat
Rotating Electrode
Dynamic Electrochemical Measurement System
Planned Acquisitions
Post-CMP Cleaning Equipment
EM Measurement Equipment
TDDB Measurement System (300mm Wafer Full-Auto Prober)
Other ongoing updates.