Ongoing Projects

Collaborative Research

Imec (Belgium)

Overseas Device Manufacturers

Semiconductor Equipment Manufacturers

Semiconductor Materials Manufacturers

National Institute of Advanced Industrial Science and Technology (AIST)

Numerous Domestic Universities

Academic Guidance Requests

In the fiscal year 2021, we temporarily provided academic guidance (discussion/topics on advanced semiconductor development) to several companies, mainly semiconductor materials manufacturers. However, starting from the fiscal year 2022, we have not been engaged in this due to focusing on 3DHI.

Competitive Research Funding

  • JST Strategic Basic Research Programs (PRESTO) 2022-2026
  • JSPS Grant-in-Aid for Scientific Research (B) 2023-2026
  • JSPS Excellent Young Researchers Program 2021-2025
  • NEDO Post-5G Information and Communication System Development Project / Advanced Semiconductor Manufacturing Technology Development
  • Private Collaborative Research Grants: Large-Scale Joint Research 2022-2025 (over 15 million yen annually, large-scale joint research with a major semiconductor equipment manufacturer)
  • International (Trilateral) Joint Development Project 2022-2024

Laboratory Equipment

300mm Wafer Capability

 

Bonding Strength Measurement System under Inert Atmosphere

Ultrasonic Microscope (SAM)

Reflow Oven

Film Thickness Measurement Equipment

Surface Contact Angle, Surface Energy Measurement Equipment

 

Evaluation Equipment

 

Mechanical Testing Room

 

Nanoindenter

4-point/3-point Bending Test Equipment

UHV Direct Bonding Equipment

 

Chemical Testing Room

 

CMP Equipment

Plating Equipment

Zeta Potential Measurement Equipment

Potentiostat

Rotating Electrode

Dynamic Electrochemical Measurement System

 

Planned Acquisitions

 

Post-CMP Cleaning Equipment

EM Measurement Equipment

TDDB Measurement System (300mm Wafer Full-Auto Prober)

 

Other ongoing updates.